Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C

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@article{5235bd358237464db7e0367809070693,

title = "Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C",

author = "S Vollebregt and FD Tichelaar and H Schellevis and CIM Beenakker and R Ishihara",

note = "Harvest",

year = "2014",

doi = "10.1016/j.carbon.2014.01.035",

language = "English",

volume = "71",

pages = "249--256",

journal = "Carbon",

issn = "0008-6223",

publisher = "Elsevier",

number = "May",

}

TY - JOUR

T1 - Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C

AU - Vollebregt, S

AU - Tichelaar, FD

AU - Schellevis, H

AU - Beenakker, CIM

AU - Ishihara, R

N1 - Harvest

PY - 2014

Y1 - 2014

U2 - 10.1016/j.carbon.2014.01.035

DO - 10.1016/j.carbon.2014.01.035

M3 - Article

SN - 0008-6223

VL - 71

SP - 249

EP - 256

JO - Carbon

JF - Carbon

IS - May

ER -