Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publication2013 IEEE International Interconnect Technology Conference - Digest of technical papers
EditorsS Ogawa
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages1-3
Number of pages3
ISBN (Print)978-1-4799-0439-6
DOIs
Publication statusPublished - 2013
EventIEEE IITC 2013, Kyoto, Japan - Piscataway, NJ, USA
Duration: 13 Jun 201315 Jun 2013

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE IITC 2013, Kyoto, Japan
Period13/06/1315/06/13

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