@inproceedings{7a219ae58521497c94a3f27d3a40e603,
title = "Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst",
author = "S Vollebregt and H Schellevis and CIM Beenakker and R Ishihara",
note = "Harvest; IEEE IITC 2013, Kyoto, Japan ; Conference date: 13-06-2013 Through 15-06-2013",
year = "2013",
doi = "10.1109/IITC.2013.6615602",
language = "English",
isbn = "978-1-4799-0439-6",
publisher = "IEEE Society",
pages = "1--3",
editor = "S Ogawa",
booktitle = "2013 IEEE International Interconnect Technology Conference - Digest of technical papers",
}