Abstract
Due to their stability, single-walled carbon nanotubes (SWCNTs) have been used for multiple applications in the semiconductor industry. Herein, we report the humidity sensing capability of SWCNTs by comparing the different densities of SWCNTs dispersed on the sensing area of the planner sensor device. Three different humidity sensors have been fabricated by preparing three different densities of CNTs diluted in deionized water and drop cast on the channel of 100 μm width between 2mm x 1mm gold electrodes. It is observed that for very low density and high density of SWCNTs sensing layer, the sensing behavior either lacks in the detection range and response time, respectively. However, we found the optimized density of SWCNTs in deionized water for a highly sensitive, fast, and high-range humidity sensor for the optimized density of SWCNTs in deionized water.
Original language | English |
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Title of host publication | 2023 IEEE 23rd International Conference on Nanotechnology, NANO 2023 |
Publisher | IEEE |
Pages | 325-328 |
Number of pages | 4 |
ISBN (Electronic) | 9798350333466 |
DOIs | |
Publication status | Published - 2023 |
Event | 23rd IEEE International Conference on Nanotechnology, NANO 2023 - Jeju City, Korea, Republic of Duration: 2 Jul 2023 → 5 Jul 2023 |
Publication series
Name | Proceedings of the IEEE Conference on Nanotechnology |
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Volume | 2023-July |
ISSN (Print) | 1944-9399 |
ISSN (Electronic) | 1944-9380 |
Conference
Conference | 23rd IEEE International Conference on Nanotechnology, NANO 2023 |
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Country/Territory | Korea, Republic of |
City | Jeju City |
Period | 2/07/23 → 5/07/23 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.