Carbon nanotubes TSV grown on an electrically conductive ZrN support layer

S Vollebregt; S Banerjee; FD Tichelaar; R Ishihara

doi:10.1109/IITC-MAM.2015.7325667

Carbon nanotubes TSV grown on an electrically conductive ZrN support layer

S Vollebregt, S Banerjee, FD Tichelaar, R Ishihara

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

8 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference
Editors	s.n.
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	281-284
Number of pages	4
ISBN (Print)	978-1-4673-7356-2
DOIs	https://doi.org/10.1109/IITC-MAM.2015.7325667
Publication status	Published - 2015
Event	IEEE IITC/MAM 2015, Grenoble, France - Piscataway, NJ, USA Duration: 18 May 2015 → 21 May 2015

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE IITC/MAM 2015, Grenoble, France
Period	18/05/15 → 21/05/15

Bibliographical note

Harvest

Access to Document

10.1109/IITC-MAM.2015.7325667

Cite this

@inproceedings{0438fae9caff41f39dfb3c4d91fed38b,

title = "Carbon nanotubes TSV grown on an electrically conductive ZrN support layer",

author = "S Vollebregt and S Banerjee and FD Tichelaar and R Ishihara",

note = "Harvest; IEEE IITC/MAM 2015, Grenoble, France ; Conference date: 18-05-2015 Through 21-05-2015",

year = "2015",

doi = "10.1109/IITC-MAM.2015.7325667",

language = "English",

isbn = "978-1-4673-7356-2",

publisher = "IEEE",

pages = "281--284",

editor = "s.n.",

booktitle = "Proceedings of the IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference",

address = "United States",

}

Vollebregt, S, Banerjee, S, Tichelaar, FD & Ishihara, R 2015, Carbon nanotubes TSV grown on an electrically conductive ZrN support layer. in s.n. (ed.), Proceedings of the IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference. IEEE, Piscataway, NJ, USA, pp. 281-284, IEEE IITC/MAM 2015, Grenoble, France, 18/05/15. https://doi.org/10.1109/IITC-MAM.2015.7325667

Carbon nanotubes TSV grown on an electrically conductive ZrN support layer. / Vollebregt, S; Banerjee, S; Tichelaar, FD et al.
Proceedings of the IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference. ed. / s.n. Piscataway, NJ, USA: IEEE, 2015. p. 281-284.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Carbon nanotubes TSV grown on an electrically conductive ZrN support layer

AU - Vollebregt, S

AU - Banerjee, S

AU - Tichelaar, FD

AU - Ishihara, R

N1 - Harvest

PY - 2015

Y1 - 2015

U2 - 10.1109/IITC-MAM.2015.7325667

DO - 10.1109/IITC-MAM.2015.7325667

M3 - Conference contribution

SN - 978-1-4673-7356-2

SP - 281

EP - 284

BT - Proceedings of the IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference

A2 - s.n., null

PB - IEEE

CY - Piscataway, NJ, USA

T2 - IEEE IITC/MAM 2015, Grenoble, France

Y2 - 18 May 2015 through 21 May 2015

ER -