Carbon nanotubes TSV grown on an electrically conductive ZrN support layer

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference
Editors s.n.
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages281-284
Number of pages4
ISBN (Print)978-1-4673-7356-2
DOIs
Publication statusPublished - 2015
EventIEEE IITC/MAM 2015, Grenoble, France - Piscataway, NJ, USA
Duration: 18 May 201521 May 2015

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE IITC/MAM 2015, Grenoble, France
Period18/05/1521/05/15

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