Fingerprint
Dive into the research topics of 'Cavity‐box soi: Advanced silicon substrate with pre‐patterned box for monolithic mems fabrication'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Marta Maria Kluba, Jian Li*, Katja Parkkinen, Marcus Louwerse, Jaap Snijder, Ronald Dekker
Research output: Contribution to journal › Article › Scientific › peer-review