Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers

GCAM Janssen, MM Abdalla, F van Keulen, BR Pujada Bermudez, B van Venrooy

Research output: Contribution to journalArticleScientificpeer-review

404 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1858-1867
Number of pages10
JournalThin Solid Films
Volume517
DOIs
Publication statusPublished - 2008

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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