Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers

GCAM Janssen; MM Abdalla; F van Keulen; BR Pujada Bermudez; B van Venrooy

doi:doi:10.1016/j.tsf.2008.07.14

Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers

GCAM Janssen, MM Abdalla, F van Keulen, BR Pujada Bermudez, B van Venrooy

Computational Design and Mechanics

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1858-1867
Number of pages	10
Journal	Thin Solid Films
Volume	517
DOIs	https://doi.org/doi:10.1016/j.tsf.2008.07.14
Publication status	Published - 2008

Keywords

CWTS 0.75 <= JFIS < 2.00

Access to Document

doi:10.1016/j.tsf.2008.07.14

Cite this

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title = "Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "GCAM Janssen and MM Abdalla and {van Keulen}, F and {Pujada Bermudez}, BR and {van Venrooy}, B",

year = "2008",

doi = "doi:10.1016/j.tsf.2008.07.14",

language = "Undefined/Unknown",

volume = "517",

pages = "1858--1867",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

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TY - JOUR

T1 - Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers

AU - Janssen, GCAM

AU - Abdalla, MM

AU - van Keulen, F

AU - Pujada Bermudez, BR

AU - van Venrooy, B

PY - 2008

Y1 - 2008

KW - CWTS 0.75 <= JFIS < 2.00

U2 - doi:10.1016/j.tsf.2008.07.14

DO - doi:10.1016/j.tsf.2008.07.14

M3 - Article

SN - 0040-6090

VL - 517

SP - 1858

EP - 1867

JO - Thin Solid Films

JF - Thin Solid Films

ER -