Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: And how to tackle them using computational techniques

Jens Bolten, Kerim T. Arat, Nezih Ünal, Caroline Porschatis, Thorsten Wahlbrink, Max C. Lemme

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    1 Citation (Scopus)
    78 Downloads (Pure)

    Abstract

    In this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include research at universities as well as industrial R and D environments focused on non-IC applications. The benefits of combining automated image acquisition and analysis with computational techniques to simulate image generation in a conventional analytical SEM with respect to the overall reliability, precision and speed of inspection will be demonstrated using real-life inspection tasks as demonstrators.

    Original languageEnglish
    Title of host publication33rd European Mask and Lithography Conference
    PublisherSPIE
    Number of pages7
    Volume10446
    ISBN (Electronic)9781510613560
    DOIs
    Publication statusPublished - 2017
    Event33rd European Mask and Lithography Conference, EMLC 2017 - Dresden, Germany
    Duration: 26 Jun 201728 Jun 2017

    Conference

    Conference33rd European Mask and Lithography Conference, EMLC 2017
    CountryGermany
    CityDresden
    Period26/06/1728/06/17

    Keywords

    • Inspection
    • Metrology
    • Nanodevices
    • Nanofabrication
    • Scanning Electron Microscopy
    • SEM
    • Simulation

    Fingerprint Dive into the research topics of 'Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: And how to tackle them using computational techniques'. Together they form a unique fingerprint.

    Cite this