Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: And how to tackle them using computational techniques

Jens Bolten, Kerim T. Arat, Nezih Ünal, Caroline Porschatis, Thorsten Wahlbrink, Max C. Lemme

    Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

    1 Citation (Scopus)
    208 Downloads (Pure)

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