Characterisation and control of piezo driven scanning probe translation mechanisms [niet eerder opgevoerd]

KR Koops; R Banning; JMTA Adriaens; WL de Koning; PMLO Scholte; WChr Heerens

Characterisation and control of piezo driven scanning probe translation mechanisms [niet eerder opgevoerd]

KR Koops, R Banning, JMTA Adriaens, WL de Koning, PMLO Scholte, WChr Heerens

Discrete Mathematics and Optimization

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	PTB-Bericht Fertigungsmeßtechnik-34
Editors	K Hasche, W Mirandé, G Wilkening
Place of Publication	Braunschweig
Publisher	Physikalisch-Technische Bundesanstalt
Pages	31-38
Number of pages	8
ISBN (Print)	3-89701-280-4
Publication status	Published - 1998
Event	3rd Seminar on Quantitative Microscopy. Geometrical measurements in the micro- and nanometer range with far and near field methods, Lyngby - Braunschweig Duration: 5 Nov 1998 → 6 Nov 1998

Publication series

Name
Publisher	Physikalisch-Technische Bundesanstalt

Conference

Conference	3rd Seminar on Quantitative Microscopy. Geometrical measurements in the micro- and nanometer range with far and near field methods, Lyngby
Period	5/11/98 → 6/11/98

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{9408b429dbe84b3cad27875356a1f396,

title = "Characterisation and control of piezo driven scanning probe translation mechanisms [niet eerder opgevoerd]",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "KR Koops and R Banning and JMTA Adriaens and {de Koning}, WL and PMLO Scholte and WChr Heerens",

year = "1998",

language = "Undefined/Unknown",

isbn = "3-89701-280-4",

publisher = "Physikalisch-Technische Bundesanstalt",

pages = "31--38",

editor = "{K Hasche} and {W Mirand{\'e}} and {G Wilkening}",

booktitle = "PTB-Bericht Fertigungsme{\ss}technik-34",

note = "3rd Seminar on Quantitative Microscopy. Geometrical measurements in the micro- and nanometer range with far and near field methods, Lyngby ; Conference date: 05-11-1998 Through 06-11-1998",

}

Koops, KR, Banning, R, Adriaens, JMTA, de Koning, WL, Scholte, PMLO & Heerens, WC 1998, Characterisation and control of piezo driven scanning probe translation mechanisms [niet eerder opgevoerd]. in K Hasche, W Mirandé & G Wilkening (eds), PTB-Bericht Fertigungsmeßtechnik-34. Physikalisch-Technische Bundesanstalt, Braunschweig, pp. 31-38, 3rd Seminar on Quantitative Microscopy. Geometrical measurements in the micro- and nanometer range with far and near field methods, Lyngby, 5/11/98.

Characterisation and control of piezo driven scanning probe translation mechanisms [niet eerder opgevoerd]. / Koops, KR; Banning, R; Adriaens, JMTA et al.
PTB-Bericht Fertigungsmeßtechnik-34. ed. / K Hasche; W Mirandé; G Wilkening. Braunschweig: Physikalisch-Technische Bundesanstalt, 1998. p. 31-38.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Characterisation and control of piezo driven scanning probe translation mechanisms [niet eerder opgevoerd]

AU - Koops, KR

AU - Banning, R

AU - Adriaens, JMTA

AU - de Koning, WL

AU - Scholte, PMLO

AU - Heerens, WChr

PY - 1998

Y1 - 1998

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 3-89701-280-4

SP - 31

EP - 38

BT - PTB-Bericht Fertigungsmeßtechnik-34

A2 - K Hasche, null

A2 - W Mirandé, null

A2 - G Wilkening, null

PB - Physikalisch-Technische Bundesanstalt

CY - Braunschweig

T2 - 3rd Seminar on Quantitative Microscopy. Geometrical measurements in the micro- and nanometer range with far and near field methods, Lyngby

Y2 - 5 November 1998 through 6 November 1998

ER -