Characterisation of defects in industrial silicon carbide (6H-SiC) by helium desorption techniques

E Oliviero, KT Westerduin, A van Veen

    Research output: Book/ReportReportScientific

    Original languageUndefined/Unknown
    PublisherUnknown Publisher
    Number of pages15
    Publication statusPublished - 2001

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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