Characterization and control of piezo driven scanning probe translation mechanisms

KR Koops, R Banning, JMTA Adriaens, WL de Koning, PMLO Scholte, WC Heerens

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationPhysikalisch-Technische Bundesanstalt, Fertigungsmesstechnik, PTB-Bericht F-34, Proceedings of the 3rd Seminar on Quantitive Microscopy
EditorsK Hasche, W Mirandé, G Wilkening
Number of pages8
Publication statusPublished - 1998

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