Original language | Undefined/Unknown |
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Title of host publication | Physikalisch-Technische Bundesanstalt, Fertigungsmesstechnik, PTB-Bericht F-34, Proceedings of the 3rd Seminar on Quantitive Microscopy |
Editors | K Hasche, W Mirandé, G Wilkening |
Pages | 31-38 |
Number of pages | 8 |
Publication status | Published - 1998 |
Characterization and control of piezo driven scanning probe translation mechanisms
KR Koops, R Banning, JMTA Adriaens, WL de Koning, PMLO Scholte, WC Heerens
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific