Characterization and control of piezo driven scanning probe translation mechanisms

KR Koops; R Banning; JMTA Adriaens; WL de Koning; PMLO Scholte; WC Heerens

Characterization and control of piezo driven scanning probe translation mechanisms

KR Koops, R Banning, JMTA Adriaens, WL de Koning, PMLO Scholte, WC Heerens

Discrete Mathematics and Optimization

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Physikalisch-Technische Bundesanstalt, Fertigungsmesstechnik, PTB-Bericht F-34, Proceedings of the 3rd Seminar on Quantitive Microscopy
Editors	K Hasche, W Mirandé, G Wilkening
Pages	31-38
Number of pages	8
Publication status	Published - 1998

Cite this

Koops, KR., Banning, R., Adriaens, JMTA., de Koning, WL., Scholte, PMLO., & Heerens, WC. (1998). Characterization and control of piezo driven scanning probe translation mechanisms. In K. Hasche, W. Mirandé, & G. Wilkening (Eds.), Physikalisch-Technische Bundesanstalt, Fertigungsmesstechnik, PTB-Bericht F-34, Proceedings of the 3rd Seminar on Quantitive Microscopy (pp. 31-38)

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title = "Characterization and control of piezo driven scanning probe translation mechanisms",

author = "KR Koops and R Banning and JMTA Adriaens and {de Koning}, WL and PMLO Scholte and WC Heerens",

year = "1998",

language = "Undefined/Unknown",

isbn = "3897012804",

pages = "31--38",

editor = "K Hasche and W Mirand{\'e} and G Wilkening",

booktitle = "Physikalisch-Technische Bundesanstalt, Fertigungsmesstechnik, PTB-Bericht F-34, Proceedings of the 3rd Seminar on Quantitive Microscopy",

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Characterization and control of piezo driven scanning probe translation mechanisms. / Koops, KR; Banning, R; Adriaens, JMTA et al.
Physikalisch-Technische Bundesanstalt, Fertigungsmesstechnik, PTB-Bericht F-34, Proceedings of the 3rd Seminar on Quantitive Microscopy. ed. / K Hasche; W Mirandé; G Wilkening. 1998. p. 31-38.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Characterization and control of piezo driven scanning probe translation mechanisms

AU - Koops, KR

AU - Banning, R

AU - Adriaens, JMTA

AU - de Koning, WL

AU - Scholte, PMLO

AU - Heerens, WC

PY - 1998

Y1 - 1998

M3 - Conference contribution

SN - 3897012804

SP - 31

EP - 38

BT - Physikalisch-Technische Bundesanstalt, Fertigungsmesstechnik, PTB-Bericht F-34, Proceedings of the 3rd Seminar on Quantitive Microscopy

A2 - Hasche, K

A2 - Mirandé, W

A2 - Wilkening, G

ER -