Characterization of a bulk-micromachined post-process module for silicon RF technology

TK Ng, PN Pham, PM Sarro, B Rejaei Salmassi, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

11 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings
Place of PublicationPiscataway
PublisherIEEE Society
Pages99-102
Number of pages4
ISBN (Print)0-7803-6255-1
Publication statusPublished - 2000
EventTopical meeting on silicon monolithic integrated circuits in RF systems, Garmisch-Partenkirchen - Piscataway
Duration: 26 Apr 200028 Apr 2000

Publication series

Name
PublisherIEEE

Conference

ConferenceTopical meeting on silicon monolithic integrated circuits in RF systems, Garmisch-Partenkirchen
Period26/04/0028/04/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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