Characterization of a bulk-micromachined post-process module for silicon RF technology

TK Ng, PN Pham, PM Sarro, B Rejaei Salmassi, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	99-102
Number of pages	4
ISBN (Print)	0-7803-6255-1
Publication status	Published - 2000
Event	Topical meeting on silicon monolithic integrated circuits in RF systems, Garmisch-Partenkirchen - Piscataway Duration: 26 Apr 2000 → 28 Apr 2000

Name
Publisher	IEEE

Conference	Topical meeting on silicon monolithic integrated circuits in RF systems, Garmisch-Partenkirchen
Period	26/04/00 → 28/04/00

Keywords

@inproceedings{2200f8704df44952af460393328b4e87,

title = "Characterization of a bulk-micromachined post-process module for silicon RF technology",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "TK Ng and PN Pham and PM Sarro and {Rejaei Salmassi}, B and JN Burghartz",

year = "2000",

language = "Undefined/Unknown",

isbn = "0-7803-6255-1",

publisher = "IEEE Society",

pages = "99--102",

booktitle = "Proceedings",

note = "null ; Conference date: 26-04-2000 Through 28-04-2000",

}

TY - GEN

T1 - Characterization of a bulk-micromachined post-process module for silicon RF technology

AU - Ng, TK

AU - Pham, PN

AU - Sarro, PM

AU - Rejaei Salmassi, B

AU - Burghartz, JN

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-6255-1

SP - 99

EP - 102

BT - Proceedings

PB - IEEE Society

CY - Piscataway

Y2 - 26 April 2000 through 28 April 2000

ER -