Characterization of AlN thin films sputtered on Al Ti electrodes for piezoelectric devices

AT Tran, H Schellevis, C Shen, HTM Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings STW-SAFE 2010
EditorsPJ French et al
Place of PublicationVeldhoven, The Netherlands
PublisherSTW
Pages121-124
Number of pages4
Publication statusPublished - 2010
EventSAFE 2010 - Veldhoven, The Netherlands
Duration: 17 Nov 2010 → …

Publication series

Name
PublisherSTW

Conference

ConferenceSAFE 2010
Period17/11/10 → …

Keywords

  • Conf.proc. > 3 pag

Cite this