Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices

AT Tran, H Schellevis, C Shen, HTM Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionProfessional

Original languageUndefined/Unknown
Title of host publicationProc. of SAFE 2009
EditorsPJ French
Place of PublicationVeldhoven, the Netherlands
PublisherSTW
Pages121-124
Number of pages4
ISBN (Print)978-90-73461-62-8
Publication statusPublished - 2009
EventSAFE 2009 - Veldhoven, The Netherlands
Duration: 26 Dec 200927 Dec 2009

Publication series

Name
PublisherSTW

Conference

ConferenceSAFE 2009
Period26/12/0927/12/09

Keywords

  • Vakpubl., Overig wet. > 3 pag

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