@inproceedings{1392a4c9b505474489bc19ba0357a03e,
title = "Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices",
keywords = "Vakpubl., Overig wet. > 3 pag",
author = "AT Tran and H Schellevis and C Shen and HTM Pham and PM Sarro",
year = "2009",
language = "Undefined/Unknown",
isbn = "978-90-73461-62-8",
publisher = "STW",
pages = "121--124",
editor = "PJ French",
booktitle = "Proc. of SAFE 2009",
note = "SAFE 2009 ; Conference date: 26-12-2009 Through 27-12-2009",
}