Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices

AT Tran, H Schellevis, C Shen, HTM Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional

Original language	Undefined/Unknown
Title of host publication	Proc. of SAFE 2009
Editors	PJ French
Place of Publication	Veldhoven, the Netherlands
Publisher	STW
Pages	121-124
Number of pages	4
ISBN (Print)	978-90-73461-62-8
Publication status	Published - 2009
Event	SAFE 2009 - Veldhoven, The Netherlands Duration: 26 Dec 2009 → 27 Dec 2009

Name
Publisher	STW

Conference	SAFE 2009
Period	26/12/09 → 27/12/09

Keywords

@inproceedings{1392a4c9b505474489bc19ba0357a03e,

title = "Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "AT Tran and H Schellevis and C Shen and HTM Pham and PM Sarro",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-90-73461-62-8",

publisher = "STW",

pages = "121--124",

editor = "PJ French",

booktitle = "Proc. of SAFE 2009",

note = "null ; Conference date: 26-12-2009 Through 27-12-2009",

}

TY - GEN

T1 - Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices

AU - Tran, AT

AU - Schellevis, H

AU - Shen, C

AU - Pham, HTM

AU - Sarro, PM

PY - 2009

Y1 - 2009

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-62-8

SP - 121

EP - 124

BT - Proc. of SAFE 2009

A2 - French, PJ

PB - STW

CY - Veldhoven, the Netherlands

Y2 - 26 December 2009 through 27 December 2009

ER -