Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture

C Yue, J Wei, ZL Chen, ZW Liu, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of 20th Micromechanics Europe Workshop (MME)
EditorsP Pons
Place of PublicationToulouse, France
PublisherLAAS-CNRS
Pages1-4
Number of pages4
Publication statusPublished - 2009
Event20th Micromechanics Europe Workshop (MME) - Toulouse, France
Duration: 20 Sep 200922 Sep 2009

Publication series

Name
PublisherLAAS-CNRS

Conference

Conference20th Micromechanics Europe Workshop (MME)
Period20/09/0922/09/09

Keywords

  • Conf.proc. > 3 pag

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