Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture

C Yue, J Wei, ZL Chen, ZW Liu, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of 20th Micromechanics Europe Workshop (MME)
Editors	P Pons
Place of Publication	Toulouse, France
Publisher	LAAS-CNRS
Pages	1-4
Number of pages	4
Publication status	Published - 2009
Event	20th Micromechanics Europe Workshop (MME) - Toulouse, France Duration: 20 Sept 2009 → 22 Sept 2009

Name
Publisher	LAAS-CNRS

Conference	20th Micromechanics Europe Workshop (MME)
Period	20/09/09 → 22/09/09

Keywords

@inproceedings{e4623473138044e2830b793793116dd0,

title = "Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture",

keywords = "Conf.proc. > 3 pag",

author = "C Yue and J Wei and ZL Chen and ZW Liu and PM Sarro",

year = "2009",

language = "Undefined/Unknown",

publisher = "LAAS-CNRS",

pages = "1--4",

editor = "P Pons",

booktitle = "Proceedings of 20th Micromechanics Europe Workshop (MME)",

note = "20th Micromechanics Europe Workshop (MME) ; Conference date: 20-09-2009 Through 22-09-2009",

}

TY - GEN

T1 - Characterization of Femto-Farad-Level Capacitive MEMS Sensors using Lock-in Architecture

AU - Yue, C

AU - Wei, J

AU - Chen, ZL

AU - Liu, ZW

AU - Sarro, PM

PY - 2009

Y1 - 2009

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 4

BT - Proceedings of 20th Micromechanics Europe Workshop (MME)

A2 - Pons, P

PB - LAAS-CNRS

CY - Toulouse, France

T2 - 20th Micromechanics Europe Workshop (MME)

Y2 - 20 September 2009 through 22 September 2009

ER -