Characterization of ferroelectric thin film materials for FeRAM

SH Le, BR Salmassi, JN Burghartz, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE 2004; Semiconductor advances for future electronics
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Pages710-713
Number of pages4
ISBN (Print)90-73461-43-X
Publication statusPublished - 2004
EventSemiconductor advances for future electronics, Veldhoven, Te Netherlands - Utrecht
Duration: 25 Nov 200426 Nov 2004

Publication series

Name
PublisherSTW Technology Foundation

Conference

ConferenceSemiconductor advances for future electronics, Veldhoven, Te Netherlands
Period25/11/0426/11/04

Keywords

  • Vakpubl., Overig wet. > 3 pag

Cite this