Characterization of ferroelectric thin film materials for FeRAM

SH Le; BR Salmassi; JN Burghartz; PM Sarro

Characterization of ferroelectric thin film materials for FeRAM

SH Le, BR Salmassi, JN Burghartz, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2004; Semiconductor advances for future electronics
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	710-713
Number of pages	4
ISBN (Print)	90-73461-43-X
Publication status	Published - 2004
Event	Semiconductor advances for future electronics, Veldhoven, Te Netherlands - Utrecht Duration: 25 Nov 2004 → 26 Nov 2004

Publication series

Name
Publisher	STW Technology Foundation

Conference

Conference	Semiconductor advances for future electronics, Veldhoven, Te Netherlands
Period	25/11/04 → 26/11/04

Bibliographical note

ed. is niet bekend/50-50 ECTM-HITEC (lijst Sarro)

Keywords

Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{3df14a7629ff45de948375774a65b557,

title = "Characterization of ferroelectric thin film materials for FeRAM",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "SH Le and BR Salmassi and JN Burghartz and PM Sarro",

note = "ed. is niet bekend/50-50 ECTM-HITEC (lijst Sarro); Semiconductor advances for future electronics, Veldhoven, Te Netherlands ; Conference date: 25-11-2004 Through 26-11-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-73461-43-X",

publisher = "STW Technology Foundation",

pages = "710--713",

booktitle = "SAFE 2004; Semiconductor advances for future electronics",

}

TY - GEN

T1 - Characterization of ferroelectric thin film materials for FeRAM

AU - Le, SH

AU - Salmassi, BR

AU - Burghartz, JN

AU - Sarro, PM

N1 - ed. is niet bekend/50-50 ECTM-HITEC (lijst Sarro)

PY - 2004

Y1 - 2004

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-43-X

SP - 710

EP - 713

BT - SAFE 2004; Semiconductor advances for future electronics

PB - STW Technology Foundation

CY - Utrecht

T2 - Semiconductor advances for future electronics, Veldhoven, Te Netherlands

Y2 - 25 November 2004 through 26 November 2004

ER -