@inproceedings{fa21d45c36eb4303886b02b3427ef2fa,
title = "Characterization of front-to backwafer alignment and bulk micromachining using electrical overlay test structures",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "{van Zeijl}, HW and JHCM Slabbekoorn",
year = "2003",
language = "Undefined/Unknown",
isbn = "0-8194-4976-8",
publisher = "SPIE",
pages = "617--626",
editor = "JC Chiao and VK Varadan and C Can{\'e}",
booktitle = "Smart Sensors, Actuators, and MEMS",
address = "United States",
note = "Microtechnologies for the New Millennium 2003, Maspalomas, Spain ; Conference date: 19-05-2003 Through 21-05-2003",
}