Characterization of front- to backwafer bulk micromachining using electrical overlay test structures

HW van Zeijl, JHCM Slabbekoorn

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	108-112
Number of pages	5
Journal	Journal of Micromechanics and Microengineering
Volume	13
Issue number	4
Publication status	Published - 2003

Keywords

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title = "Characterization of front- to backwafer bulk micromachining using electrical overlay test structures",

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author = "{van Zeijl}, HW and JHCM Slabbekoorn",

year = "2003",

language = "Undefined/Unknown",

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pages = "108--112",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

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}

TY - JOUR

T1 - Characterization of front- to backwafer bulk micromachining using electrical overlay test structures

AU - van Zeijl, HW

AU - Slabbekoorn, JHCM

PY - 2003

Y1 - 2003

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 0960-1317

VL - 13

SP - 108

EP - 112

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 4

ER -