Characterization of front to backwafer bulk micromachining using electrical overlay test structures

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	MME 2002 The 13th Micromechanics Europe Workshop
Place of Publication	s.l.
Publisher	s.n.
Pages	343-346
Number of pages	4
ISBN (Print)	973-0-02472-3
Publication status	Published - 2002
Event	MME 2002, Sinaia, Romania - s.l. Duration: 6 Oct 2002 → 8 Oct 2002

Name
Publisher	s.n.

Conference	MME 2002, Sinaia, Romania
Period	6/10/02 → 8/10/02

Keywords

@inproceedings{dc0351855c4c488ba0833e31d9382799,

title = "Characterization of front to backwafer bulk micromachining using electrical overlay test structures",

keywords = "Conf.proc. > 3 pag",

author = "{van Zeijl}, HW and J Slabbekoorn",

year = "2002",

language = "Undefined/Unknown",

isbn = "973-0-02472-3",

publisher = "s.n.",

pages = "343--346",

booktitle = "MME 2002 The 13th Micromechanics Europe Workshop",

note = "MME 2002, Sinaia, Romania ; Conference date: 06-10-2002 Through 08-10-2002",

}

TY - GEN

T1 - Characterization of front to backwafer bulk micromachining using electrical overlay test structures

AU - van Zeijl, HW

AU - Slabbekoorn, J

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 973-0-02472-3

SP - 343

EP - 346

BT - MME 2002 The 13th Micromechanics Europe Workshop

PB - s.n.

CY - s.l.

T2 - MME 2002, Sinaia, Romania

Y2 - 6 October 2002 through 8 October 2002

ER -