Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators

B.T. Buijtendorp, J. Bueno, D.J. Thoen, V. Murugesan P.M. Sberna, J.J.A. Baselmans, S. Vollebregt, A. Endo

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1 Citation (Scopus)
5 Downloads (Pure)

Abstract

Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below 10−5 for a resonator energy of 105 photons, at 120 mK and 4–7 GHz. This makes these films promising for microwave kinetic inductance detectors and on-chip millimeter-submilimeter filters.
Original languageEnglish
Title of host publicationMillimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X
EditorsJonas Zmuidzinas, Jian-Rong Gao
PublisherSPIE
Pages459 - 472
ISBN (Electronic)9781510636934
DOIs
Publication statusPublished - 2020
EventMillimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X - Virtual/online event due to COVID-19
Duration: 14 Dec 202018 Dec 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11453
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceMillimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X
Abbreviated titleSpie 11453
Period14/12/2018/12/20

Keywords

  • Amorphous Silicon
  • Dielectric Loss
  • Filter Bank
  • Kinetic Inductance Detectors
  • Millimeter-wave
  • Spectrometer
  • Submillimeter-wave
  • Two-level Systems

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