@article{c38bac9cbcc443b997e1082d6d133819,
title = "Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications",
author = "Y Huang and G Pandraud and PM Sarro",
note = "Harvest",
year = "2013",
doi = "10.1116/1.4772664",
language = "English",
volume = "31",
pages = "1--8",
journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "1",
}