Characterization of LPCVD amorphous silicon carbide (a-SiC) as material for electron transparent windows

B Morana, G Pandraud, JF Creemer, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)654-662
Number of pages9
JournalMaterials Chemistry and Physics
Volume139
Issue number2-3
DOIs
Publication statusPublished - 2013

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