Characterization of PVD Aluminum Nitride for Heat Spreading in RF IC¿s

L La Spina, LK Nanver, E Iborra, M Clement, J Olivares, H Schellevis

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProc. IEEE ESSDERC 2007
Editors s.n.
Place of PublicationMunich, Germany
PublisherIEEE Society
Pages354-357
Number of pages4
Publication statusPublished - 2007

Publication series

Name
PublisherIEEE

Keywords

  • departmental working papers
  • Conf.proc. > 3 pag

Cite this

La Spina, L., Nanver, LK., Iborra, E., Clement, M., Olivares, J., & Schellevis, H. (2007). Characterization of PVD Aluminum Nitride for Heat Spreading in RF IC¿s. In s.n. (Ed.), Proc. IEEE ESSDERC 2007 (pp. 354-357). IEEE Society.