Characterization of PVD Aluminum Nitride for Heat Spreading in RF IC¿s

L La Spina, LK Nanver, E Iborra, M Clement, J Olivares, H Schellevis

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. IEEE ESSDERC 2007
Editors s.n.
Place of PublicationMunich, Germany
PublisherIEEE Society
Pages354-357
Number of pages4
Publication statusPublished - 2007

Publication series

Name
PublisherIEEE

Keywords

  • departmental working papers
  • Conf.proc. > 3 pag

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