Characterization of the effects that play a role in photonic strain sensors in silicon-on-insulator technology

W. J. Westerveld, J. Pozo, P. J. Harmsma, R. Schmits, E. Tabak, S. M. Leinders, K. W. A. van Dongen, H. P. Urbach, M. Yousefi

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

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Abstract

Recently there has been a growing interest in sensing by means of optical microring resonators in photonic integrated circuits (PIC) that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et. al. proposed the use of a waveguide based ring resonator as a strain gauge. However, the strong lateral confinement of the light in SOI waveguides and its corresponding modal dispersion was not taken into account. We present experimental results and understanding of the effects of an applied strain in the effective index in a SOI-PIC. In addition, we also investigated the influence of the waveguide geometry.
Original languageEnglish
Title of host publicationProceedings of the 16th Annual Symposium of the IEEE Photonics Society Benelux Chapter
Pages69-72
Number of pages4
Publication statusPublished - 2011
Event16th Annual Symposium of the IEEE Photonics Society Benelux - Ghent, Belgium
Duration: 1 Sept 20112 Dec 2011

Conference

Conference16th Annual Symposium of the IEEE Photonics Society Benelux
Country/TerritoryBelgium
CityGhent
Period1/09/112/12/11

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