Characterization of the fabrication process of Nb/Al-AlNx/Nb tunnel junctions with low RnA values up to 1 omega mu m²

N Iossad, AB Ermakov, FE Meijer, BD Jackson, TM Klapwijk

    Research output: Contribution to journalArticleScientificpeer-review

    17 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)945-951
    Number of pages7
    JournalSuperconductor Science & Technology
    Volume15
    Issue number6
    Publication statusPublished - 2002

    Keywords

    • academic journal papers
    • ZX CWTS JFIS < 1.00

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