@article{61853eca123849e890d49099ea22f483,
title = "Characterization of the fabrication process of Nb/Al-AlNx/Nb tunnel junctions with low RnA values up to 1 omega mu m²",
keywords = "academic journal papers, ZX CWTS JFIS < 1.00",
author = "N Iossad and AB Ermakov and FE Meijer and BD Jackson and TM Klapwijk",
year = "2002",
language = "Undefined/Unknown",
volume = "15",
pages = "945--951",
journal = "Superconductor Science & Technology",
issn = "0953-2048",
publisher = "IOP Publishing",
number = "6",
}