Characterization of thermal cross-talk in a MEMS-based thermopile detector array

HW Wu, S Grabarnik, A Emadi, G de Graaf, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)74022(1)-74022(7)
JournalJournal of Micromechanics and Microengineering
Volume19
Publication statusPublished - 2009

Keywords

  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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