Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators

S. Thomas, A. Jovic, B. Morana, F. Buja, A. Gkouzou, G. Pandraud, P.M. Sarro

Research output: Contribution to journal › Conference article › Scientific › peer-review

2 Citations (Scopus)
70 Downloads (Pure)

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