Characterization of thin film MEMS packages

Q Li

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • van Keulen, A., Supervisor
  • Goosen, J.F.L., Advisor
  • Müller, J., Advisor, External person
  • Zhang, G.Q., Advisor
  • Sarro, P.M., Advisor
  • van Beek, JTM, Advisor, External person
  • Staufer, U., Advisor
Award date3 Dec 2012
Place of PublicationEnschede
Print ISBNs978-90-7717282-7
Publication statusPublished - 2012


  • authored books
  • Diss. prom. aan TU Delft

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