Characterization of thin film MEMS packages

Q Li

Research output: Thesis › Dissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • van Keulen, A., Promotor
  • Goosen, J.F.L., Copromotor
  • Müller, J., Copromotor, External person
  • Zhang, G.Q., Copromotor
  • Sarro, P.M., Copromotor
  • van Beek, JTM, Copromotor, External person
  • Staufer, U., Copromotor
Award date3 Dec 2012
Place of PublicationEnschede
Print ISBNs978-90-7717282-7
Publication statusPublished - 2012

Keywords

  • authored books
  • Diss. prom. aan TU Delft

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