Characterization of TiN, Ti(C,N) and (Ti,Al)N thin films coated via PECVD on tool steels.

D Munteanu, N van Landschoot, J Schoonman, A Munteanu

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationEuropean Conference on Advanced Materials and technologies (Euro-techmat 2)
    Publication statusPublished - 2001

    Bibliographical note

    Proceedings op CD-ROM


    • ZX Int.klas.verslagjaar < 2002

    Cite this