Characterization of TiN, Ti(C,N) and (Ti,Al)N thin films coated via PECVD on tool steels.

D Munteanu, N van Landschoot, J Schoonman, A Munteanu

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	European Conference on Advanced Materials and technologies (Euro-techmat 2)
Pages	-
Publication status	Published - 2001

Proceedings op CD-ROM

Keywords

@inproceedings{d66190b3ae944ef6b727f1484e4b8aec,

title = "Characterization of TiN, Ti(C,N) and (Ti,Al)N thin films coated via PECVD on tool steels.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "D Munteanu and {van Landschoot}, N and J Schoonman and A Munteanu",

note = "Proceedings op CD-ROM",

year = "2001",

language = "Undefined/Unknown",

pages = "--",

booktitle = "European Conference on Advanced Materials and technologies (Euro-techmat 2)",

}

TY - GEN

T1 - Characterization of TiN, Ti(C,N) and (Ti,Al)N thin films coated via PECVD on tool steels.

AU - Munteanu, D

AU - van Landschoot, N

AU - Schoonman, J

AU - Munteanu, A

N1 - Proceedings op CD-ROM

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - -

BT - European Conference on Advanced Materials and technologies (Euro-techmat 2)

ER -