Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures

HW van Zeijl; FGC Bijnen; J Slabbekoorn

Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures

HW van Zeijl, FGC Bijnen, J Slabbekoorn

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

8 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	MEMS, MOEMS, and Micromachining
Editors	H Urey, A El-Fatatry
Place of Publication	Bellingham
Publisher	SPIE
Pages	398-406
Number of pages	9
ISBN (Print)	0-8194-5378-1
Publication status	Published - 2004
Event	MEMS, MOEMS, and Micromachining, Strasbourg, France - Bellingham Duration: 29 Apr 2004 → 30 Apr 2004

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	5455
ISSN (Print)	0277-786X

Conference

Conference	MEMS, MOEMS, and Micromachining, Strasbourg, France
Period	29/04/04 → 30/04/04

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Peer-lijst tijdschrift

Cite this

van Zeijl, HW., Bijnen, FGC., & Slabbekoorn, J. (2004). Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures. In H. Urey, & A. El-Fatatry (Eds.), MEMS, MOEMS, and Micromachining (pp. 398-406). (Proceedings of SPIE- International Society for Optical Engineering; Vol. 5455). SPIE.

van Zeijl, HW ; Bijnen, FGC ; Slabbekoorn, J. / Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures. MEMS, MOEMS, and Micromachining. editor / H Urey ; A El-Fatatry. Bellingham : SPIE, 2004. pp. 398-406 (Proceedings of SPIE- International Society for Optical Engineering).

@inproceedings{a2edf032d95644728b7900d45270316a,

title = "Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Peer-lijst tijdschrift",

author = "{van Zeijl}, HW and FGC Bijnen and J Slabbekoorn",

year = "2004",

language = "Undefined/Unknown",

isbn = "0-8194-5378-1",

publisher = "SPIE",

pages = "398--406",

editor = "H Urey and A El-Fatatry",

booktitle = "MEMS, MOEMS, and Micromachining",

address = "United States",

note = "MEMS, MOEMS, and Micromachining, Strasbourg, France ; Conference date: 29-04-2004 Through 30-04-2004",

}

van Zeijl, HW, Bijnen, FGC & Slabbekoorn, J 2004, Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures. in H Urey & A El-Fatatry (eds), MEMS, MOEMS, and Micromachining. Proceedings of SPIE- International Society for Optical Engineering, vol. 5455, SPIE, Bellingham, pp. 398-406, MEMS, MOEMS, and Micromachining, Strasbourg, France, 29/04/04.

Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures. / van Zeijl, HW; Bijnen, FGC; Slabbekoorn, J.
MEMS, MOEMS, and Micromachining. ed. / H Urey; A El-Fatatry. Bellingham: SPIE, 2004. p. 398-406 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 5455).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures

AU - van Zeijl, HW

AU - Bijnen, FGC

AU - Slabbekoorn, J

PY - 2004

Y1 - 2004

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Peer-lijst tijdschrift

M3 - Conference contribution

SN - 0-8194-5378-1

SP - 398

EP - 406

BT - MEMS, MOEMS, and Micromachining

A2 - Urey, H

A2 - El-Fatatry, A

PB - SPIE

CY - Bellingham

T2 - MEMS, MOEMS, and Micromachining, Strasbourg, France

Y2 - 29 April 2004 through 30 April 2004

ER -