Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

H Sadeghian Marnani; CK Yang; JFL Goosen; E Drift; A Bossche; PJ French; F van Keulen

Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

H Sadeghian Marnani, CK Yang, JFL Goosen, E Drift, A Bossche, PJ French, F van Keulen

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of

Original language	Undefined/Unknown
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	94
Issue number	221903
Publication status	Published - 2009

Keywords

academic journal papers
CWTS 0.75 <= JFIS < 2.00

Cite this

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title = "Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability",

abstract = "This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of",

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volume = "94",

pages = "1--3",

journal = "Applied Physics Letters",

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T1 - Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

AU - Sadeghian Marnani, H

AU - Yang, CK

AU - Goosen, JFL

AU - Drift, E

AU - Bossche, A

AU - French, PJ

AU - van Keulen, F

PY - 2009

Y1 - 2009

N2 - This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of

AB - This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

UR - http://apl.aip.org/apl

M3 - Article

SN - 0003-6951

VL - 94

SP - 1

EP - 3

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 221903

ER -

Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

Abstract

Keywords

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