Abstract
This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of
Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 1-3 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 94 |
Issue number | 221903 |
Publication status | Published - 2009 |
Keywords
- academic journal papers
- CWTS 0.75 <= JFIS < 2.00