Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

H Sadeghian Marnani, CK Yang, JFL Goosen, E Drift, A Bossche, PJ French, F van Keulen

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This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of
Original languageUndefined/Unknown
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Issue number221903
Publication statusPublished - 2009


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