Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

H Sadeghian Marnani, CK Yang, JFL Goosen, E Drift, A Bossche, PJ French, F van Keulen

Research output: Contribution to journalArticleScientificpeer-review

119 Citations (Scopus)

Abstract

This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of
Original languageUndefined/Unknown
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume94
Issue number221903
Publication statusPublished - 2009

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

Cite this