Original language | English |
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IPC | H01J, G21K |
Priority date | 27/02/19 |
Publication status | Published - 2020 |
Bibliographical note
Patent: OCT-19-037Applicant: FEI corporation
P. Kruit (Inventor), A. Mohammadi Gheidari (Inventor), Erik René Kieft (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | H01J, G21K |
Priority date | 27/02/19 |
Publication status | Published - 2020 |