| Original language | English |
|---|---|
| IPC | H01J, G21K |
| Priority date | 27/02/19 |
| Publication status | Published - 2020 |
Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets
P. Kruit (Inventor), A. Mohammadi Gheidari (Inventor), Erik René Kieft (Inventor)
Research output: Patent