Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets

P. Kruit (Inventor), A. Mohammadi Gheidari (Inventor), Erik René Kieft (Inventor)

Research output: Patent

Original languageEnglish
IPCH01J, G21K
Priority date27/02/19
Publication statusPublished - 2020

Bibliographical note

Patent: OCT-19-037
Applicant: FEI corporation

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