Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets

P. Kruit (Inventor), A. Mohammadi Gheidari (Inventor), Erik René Kieft (Inventor)

Research output: Patent

Patent: OCT-19-037
Applicant: FEI Electron Optics B.V.

Cite this

@misc{d371ce3029a24591a984b237d8a5cfcc,

title = "Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets",

author = "P. Kruit and {Mohammadi Gheidari}, A. and Kieft, {Erik Ren{\'e}}",

note = "Patent: OCT-19-037 Applicant: FEI Electron Optics B.V.; US 11961709 B2; H01J, G21K",

year = "2020",

language = "English",

type = "Patent",

}