Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets

P. Kruit (Inventor), A. Mohammadi Gheidari (Inventor), Erik René Kieft (Inventor)

ImPhys/Microscopy Instrumentation & Techniques

Research output: Patent

1 Patent

1 results

2020

Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets
Kruit, P., Mohammadi Gheidari, A. & Kieft, E. R., 2020, IPC No. H01J, G21K, Priority date 27 Feb 2019, Priority No. US 2020273667 A1
Research output: Patent