Charged particle single nanometre manufacturing

Philip D. Prewett*, Cornelis W. Hagen, Claudia Lenk, Steve Lenk, Marcus Kaestner, Tzvetan Ivanov, Ahmad Ahmad, Alex P.G. Robinson, Sangeetha Hari, Marijke Scotuzzi, More Authors

*Corresponding author for this work

    Research output: Contribution to journal › Review article › peer-review

    6 Citations (Scopus)
    53 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Charged particle single nanometre manufacturing'. Together they form a unique fingerprint.

    Material Science

    Engineering

    INIS