@article{84518f39b3014d778eb762d9f1ef8678,
title = "Chemistry for electron-induced nanofabrication",
keywords = "Electron-induced chemistry, FEBID, FEBIP, Nanofabrication, Nanolithography",
author = "Petra Swiderek and Hubertus Marbach and Hagen, {Cornelis W.}",
year = "2018",
doi = "10.3762/bjnano.9.124",
language = "English",
volume = "9",
pages = "1317--1320",
journal = "Beilstein Journal of Nanotechnology",
issn = "2190-4286",
publisher = "Beilstein-Institut Zur Forderung der Chemischen Wissenschaften",
number = "1",
}