Cl2-based inductively coupled plasma etching of photonic crystals in InP,

RW van der Heijden, CF Carlström, MSP Andriesse, EWJM van der Drift, EJ Geluk, F Karouta, P Nouwens, YS Oei, T de Vries, HWM Salemink

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings Symposium IEEE=LEOS Benelux chapter, 2004
EditorsG Mortiier, P van Daele
PublisherIEEE Society
Number of pages4
ISBN (Print)9076546061
Publication statusPublished - 2004

Publication series



  • conference contrib. refereed
  • Conf.proc. > 3 pag

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