Cl2-based inductively coupled plasma etching of photonic crystals in InP,

RW van der Heijden; CF Carlström; MSP Andriesse; EWJM van der Drift; EJ Geluk; F Karouta; P Nouwens; YS Oei; T de Vries; HWM Salemink

Cl2-based inductively coupled plasma etching of photonic crystals in InP,

RW van der Heijden, CF Carlström, MSP Andriesse, EWJM van der Drift, EJ Geluk, F Karouta, P Nouwens, YS Oei, T de Vries, HWM Salemink

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings Symposium IEEE=LEOS Benelux chapter, 2004
Editors	G Mortiier, P van Daele
Publisher	IEEE Society
Pages	287-290
Number of pages	4
ISBN (Print)	9076546061
Publication status	Published - 2004

Publication series

Name
Publisher	IEEE

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{e4a8f9a1087d4183957db2a9c1136970,

title = "Cl2-based inductively coupled plasma etching of photonic crystals in InP,",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{van der Heijden}, RW and CF Carlstr{\"o}m and MSP Andriesse and {van der Drift}, EWJM and EJ Geluk and F Karouta and P Nouwens and YS Oei and {de Vries}, T and HWM Salemink",

year = "2004",

language = "Undefined/Unknown",

isbn = "9076546061",

publisher = "IEEE Society",

pages = "287--290",

editor = "G Mortiier and {van Daele}, P",

booktitle = "Proceedings Symposium IEEE=LEOS Benelux chapter, 2004",

}

Cl2-based inductively coupled plasma etching of photonic crystals in InP, / van der Heijden, RW; Carlström, CF; Andriesse, MSP et al.
Proceedings Symposium IEEE=LEOS Benelux chapter, 2004. ed. / G Mortiier; P van Daele. IEEE Society, 2004. p. 287-290.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Cl2-based inductively coupled plasma etching of photonic crystals in InP,

AU - van der Heijden, RW

AU - Carlström, CF

AU - Andriesse, MSP

AU - van der Drift, EWJM

AU - Geluk, EJ

AU - Karouta, F

AU - Nouwens, P

AU - Oei, YS

AU - de Vries, T

AU - Salemink, HWM

PY - 2004

Y1 - 2004

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 9076546061

SP - 287

EP - 290

BT - Proceedings Symposium IEEE=LEOS Benelux chapter, 2004

A2 - Mortiier, G

A2 - van Daele, P

PB - IEEE Society

ER -