Closed loop thermal control of a lithographic optical component

R Saathof; JW Spronck; RH Munnig Schmidt; A Haber; M Verhaegen

Closed loop thermal control of a lithographic optical component

R Saathof, JW Spronck, RH Munnig Schmidt, A Haber, M Verhaegen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013
Editors	BR Knapp
Place of Publication	Raleigh, NC, USA
Publisher	ASPE
Pages	138-143
Number of pages	6
Publication status	Published - 2013
Event	28th ASPE, St. Paul, MN, USA - Raleigh, NC, USA Duration: 20 Oct 2013 → 25 Oct 2013

Publication series

Name
Publisher	ASPE

Conference

Conference	28th ASPE, St. Paul, MN, USA
Period	20/10/13 → 25/10/13

Bibliographical note

harvest
23-01-2013 nog niet gepubliceerd

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{2db7bfd098d94dec917c820873694df8,

title = "Closed loop thermal control of a lithographic optical component",

keywords = "Conf.proc. > 3 pag",

author = "R Saathof and JW Spronck and {Munnig Schmidt}, RH and A Haber and M Verhaegen",

note = "harvest 23-01-2013 nog niet gepubliceerd; 28th ASPE, St. Paul, MN, USA ; Conference date: 20-10-2013 Through 25-10-2013",

year = "2013",

language = "English",

publisher = "ASPE",

pages = "138--143",

editor = "BR Knapp",

booktitle = "Proceedings 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013",

}

Closed loop thermal control of a lithographic optical component. / Saathof, R ; Spronck, JW; Munnig Schmidt, RH et al.
Proceedings 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013. ed. / BR Knapp. Raleigh, NC, USA: ASPE, 2013. p. 138-143.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Closed loop thermal control of a lithographic optical component

AU - Saathof, R

AU - Spronck, JW

AU - Munnig Schmidt, RH

AU - Haber, A

AU - Verhaegen, M

N1 - harvest 23-01-2013 nog niet gepubliceerd

PY - 2013

Y1 - 2013

KW - Conf.proc. > 3 pag

UR - http://www.aspe.net/publications/Short%20Abstracts%2013A/3808.pdf

M3 - Conference contribution

SP - 138

EP - 143

BT - Proceedings 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013

A2 - Knapp, BR

PB - ASPE

CY - Raleigh, NC, USA

T2 - 28th ASPE, St. Paul, MN, USA

Y2 - 20 October 2013 through 25 October 2013

ER -

Closed loop thermal control of a lithographic optical component

Publication series

Conference

Bibliographical note

Keywords

Other files and links

Cite this