CMOS compatible embedded microchannels

Ronald Stoute, J.M. Muganda, S. Dahar, Aslihan Arslan, R.J.M Henderikx, P.C.M. van Stiphout, JMJ den Toonder, Ronald Dekker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Abstract

Microfluidics has been identified as a revolutionizing technology for chemistry and biology, enabling cost-effective semi-automated experiments without extensive laboratory infrastructure. However, the complexity and number of simultaneous experiments is limited with current fabrication approaches. We present a novel CMOS compatible process to fabricate embedded microchannels that can greatly enhance the functionality and scalability of microfluidic experimentation. The feasibility of the fabrication process is demonstrated with a device to probe mechanical properties of cells before and after presenting them a stimulus.
Original languageEnglish
Title of host publication20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2016)
Place of PublicationNew York
PublisherChemical and Biological Microsystems Society
Pages164-167
Number of pages4
Volume1
ISBN (Electronic)978-1-5108-3416-3
Publication statusPublished - 2017
Event20th International Conference on Miniaturized Systems for Chemistry and Life Sciences: (MicroTAS 2016) - Dublin, Ireland
Duration: 9 Oct 201613 Oct 2016

Conference

Conference20th International Conference on Miniaturized Systems for Chemistry and Life Sciences
CountryIreland
CityDublin
Period9/10/1613/10/16

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