CMOS compatible embedded microchannels

Ronald Stoute; J.M. Muganda; S. Dahar; Aslihan Arslan; R.J.M Henderikx; P.C.M. van Stiphout; JMJ den Toonder; Ronald Dekker

CMOS compatible embedded microchannels

Ronald Stoute, J.M. Muganda, S. Dahar, Aslihan Arslan, R.J.M Henderikx, P.C.M. van Stiphout, JMJ den Toonder, Ronald Dekker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Abstract

Microfluidics has been identified as a revolutionizing technology for chemistry and biology, enabling cost-effective semi-automated experiments without extensive laboratory infrastructure. However, the complexity and number of simultaneous experiments is limited with current fabrication approaches. We present a novel CMOS compatible process to fabricate embedded microchannels that can greatly enhance the functionality and scalability of microfluidic experimentation. The feasibility of the fabrication process is demonstrated with a device to probe mechanical properties of cells before and after presenting them a stimulus.

Original language	English
Title of host publication	20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2016)
Place of Publication	New York
Publisher	Chemical and Biological Microsystems Society
Pages	164-167
Number of pages	4
Volume	1
ISBN (Electronic)	978-1-5108-3416-3
Publication status	Published - 2017
Event	20th International Conference on Miniaturized Systems for Chemistry and Life Sciences: (MicroTAS 2016) - Dublin, Ireland Duration: 9 Oct 2016 → 13 Oct 2016

Conference

Conference	20th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Country/Territory	Ireland
City	Dublin
Period	9/10/16 → 13/10/16

Cite this

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title = "CMOS compatible embedded microchannels",

abstract = "Microfluidics has been identified as a revolutionizing technology for chemistry and biology, enabling cost-effective semi-automated experiments without extensive laboratory infrastructure. However, the complexity and number of simultaneous experiments is limited with current fabrication approaches. We present a novel CMOS compatible process to fabricate embedded microchannels that can greatly enhance the functionality and scalability of microfluidic experimentation. The feasibility of the fabrication process is demonstrated with a device to probe mechanical properties of cells before and after presenting them a stimulus.",

author = "Ronald Stoute and J.M. Muganda and S. Dahar and Aslihan Arslan and R.J.M Henderikx and {van Stiphout}, P.C.M. and {den Toonder}, JMJ and Ronald Dekker",

year = "2017",

language = "English",

volume = "1",

pages = "164--167",

booktitle = "20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2016)",

publisher = "Chemical and Biological Microsystems Society",

note = "20th International Conference on Miniaturized Systems for Chemistry and Life Sciences : (MicroTAS 2016) ; Conference date: 09-10-2016 Through 13-10-2016",

}

Stoute, R, Muganda, JM, Dahar, S, Arslan, A, Henderikx, RJM, van Stiphout, PCM, den Toonder, JMJ & Dekker, R 2017, CMOS compatible embedded microchannels. in 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2016). vol. 1, Chemical and Biological Microsystems Society, New York, pp. 164-167, 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Dublin, Ireland, 9/10/16.

CMOS compatible embedded microchannels. / Stoute, Ronald; Muganda, J.M.; Dahar, S. et al.
20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2016). Vol. 1 New York: Chemical and Biological Microsystems Society, 2017. p. 164-167.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - CMOS compatible embedded microchannels

AU - Stoute, Ronald

AU - Muganda, J.M.

AU - Dahar, S.

AU - Arslan, Aslihan

AU - Henderikx, R.J.M

AU - van Stiphout, P.C.M.

AU - den Toonder, JMJ

AU - Dekker, Ronald

PY - 2017

Y1 - 2017

N2 - Microfluidics has been identified as a revolutionizing technology for chemistry and biology, enabling cost-effective semi-automated experiments without extensive laboratory infrastructure. However, the complexity and number of simultaneous experiments is limited with current fabrication approaches. We present a novel CMOS compatible process to fabricate embedded microchannels that can greatly enhance the functionality and scalability of microfluidic experimentation. The feasibility of the fabrication process is demonstrated with a device to probe mechanical properties of cells before and after presenting them a stimulus.

AB - Microfluidics has been identified as a revolutionizing technology for chemistry and biology, enabling cost-effective semi-automated experiments without extensive laboratory infrastructure. However, the complexity and number of simultaneous experiments is limited with current fabrication approaches. We present a novel CMOS compatible process to fabricate embedded microchannels that can greatly enhance the functionality and scalability of microfluidic experimentation. The feasibility of the fabrication process is demonstrated with a device to probe mechanical properties of cells before and after presenting them a stimulus.

M3 - Conference contribution

VL - 1

SP - 164

EP - 167

BT - 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2016)

PB - Chemical and Biological Microsystems Society

CY - New York

T2 - 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Y2 - 9 October 2016 through 13 October 2016

ER -

CMOS compatible embedded microchannels

Abstract

Conference

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