TY - GEN
T1 - CMOS Compatible Fabrication of Mid Infrared Microspectrometers Based on an Array of Metamaterial Absorbers
AU - Ghaderi, Mohammad Amir
AU - Enoksson, Peter
AU - Wolffenbuttel, Reinoud F.
PY - 2019
Y1 - 2019
N2 - The design of a mid-infrared micro-spectrometer based on an array of differently tuned narrow-band metamaterial absorbers is presented. The spectral response is tailored by the design of the unit cell. Each spectral band is composed of a thermopile detector with a 300 ×180 μm2 Al-based metamaterial absorber fabricated in a CMOS compatible post-process. The challenges in the fabrication of the sub-μm features within the unit cell over a several mm2 absorber area by equipment that is part of the standard infrastructure of a MEMS facility is addressed. The design and fabrication method utilized here for the first time enables the CMOS fabrication of integrated large-area plasmonic components on thermal detectors.
AB - The design of a mid-infrared micro-spectrometer based on an array of differently tuned narrow-band metamaterial absorbers is presented. The spectral response is tailored by the design of the unit cell. Each spectral band is composed of a thermopile detector with a 300 ×180 μm2 Al-based metamaterial absorber fabricated in a CMOS compatible post-process. The challenges in the fabrication of the sub-μm features within the unit cell over a several mm2 absorber area by equipment that is part of the standard infrastructure of a MEMS facility is addressed. The design and fabrication method utilized here for the first time enables the CMOS fabrication of integrated large-area plasmonic components on thermal detectors.
KW - CMOS Compatible fabrication
KW - MEMS spectrometer
KW - Metamaterial midinfrared absorber
KW - Mid-IR detector array
UR - http://www.scopus.com/inward/record.url?scp=85071948112&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2019.8808691
DO - 10.1109/TRANSDUCERS.2019.8808691
M3 - Conference contribution
AN - SCOPUS:85071948112
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 1580
EP - 1583
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PB - IEEE
T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Y2 - 23 June 2019 through 27 June 2019
ER -