@inproceedings{bdf98e4d646247d79cef99391c2b9226,
title = "CMOS compatible pressure sensors: a comparison between SiC and SiN",
keywords = "Vakpubl., Overig wet. > 3 pag",
author = "L Pakula and H Yang and PJ French and PM Sarro",
note = "ed. is niet bekend; Semiconductor advances for future electornics, Veldhoven, The Netherlands ; Conference date: 25-11-2004 Through 26-11-2004",
year = "2004",
language = "Undefined/Unknown",
isbn = "90-73461-43-X",
publisher = "STW Technology Foundation",
pages = "769--773",
booktitle = "SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics",
}