CMOS-compatible wells for integrated high-speed screening arrays

BL Gray; R Moerman; LR van den Doel; HRC Dietrich; VP Iordanov; NP Pham; PM Sarro; A Bossche; MJ Vellekoop

CMOS-compatible wells for integrated high-speed screening arrays

BL Gray, R Moerman, LR van den Doel, HRC Dietrich, VP Iordanov, NP Pham, PM Sarro, A Bossche, MJ Vellekoop

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Abstract

This paper explores the use of photo patternable polymers for integrated high-speed screening arrays, where enzyme reactions are monitored in nano liter volume reactors using fluorescence of NADH and photodiode detection. Implementing the array of nano liter volume wells using a low-temperature CMOS-compatible process allows wells to be patterned after the photodiode array and electronics fabrication is completed. We demonstrate filling of 400 $MUL 400 micron square, 25 micron deep photoresist-on-silicon wells with liquid samples by electro spray and wetting. We also demonstrate usability of the wells on NADH samples by measuring the fluorescence of 0.1, 0.5 and 1 millimolar NADH solutions using external optics.

Original language	Undefined/Unknown
Title of host publication	Biomedical Nanotechnology Architectures and Applications, Proceedings
Editors	DJ Bornhop, DA Dunn, RP Mariella, CJ Murphy, DV Nicolau, Shuming Nie, M Palmer, R Raghavachari
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	103-108
Number of pages	6
ISBN (Print)	0-8194-4365-4
Publication status	Published - 2002
Event	Biomedical Nanotechnology Architectures and Applications (San Jose, CA, USA) - Bellingham, WA, USA Duration: 20 Jan 2002 → 21 Jan 2002

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	4626
ISSN (Print)	0277-786X

Conference

Conference	Biomedical Nanotechnology Architectures and Applications (San Jose, CA, USA)
Period	20/01/02 → 21/01/02

Bibliographical note

ISSN 0277-786X, phpub 31

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

Gray, BL., Moerman, R., van den Doel, LR., Dietrich, HRC., Iordanov, VP., Pham, NP., Sarro, PM., Bossche, A., & Vellekoop, MJ. (2002). CMOS-compatible wells for integrated high-speed screening arrays. In DJ. Bornhop, DA. Dunn, RP. Mariella, CJ. Murphy, DV. Nicolau, S. Nie, M. Palmer, & R. Raghavachari (Eds.), Biomedical Nanotechnology Architectures and Applications, Proceedings (pp. 103-108). (Proceedings of SPIE- International Society for Optical Engineering; Vol. 4626). SPIE.

Gray, BL ; Moerman, R ; van den Doel, LR et al. / CMOS-compatible wells for integrated high-speed screening arrays. Biomedical Nanotechnology Architectures and Applications, Proceedings. editor / DJ Bornhop ; DA Dunn ; RP Mariella ; CJ Murphy ; DV Nicolau ; Shuming Nie ; M Palmer ; R Raghavachari. Bellingham, WA, USA : SPIE, 2002. pp. 103-108 (Proceedings of SPIE- International Society for Optical Engineering).

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title = "CMOS-compatible wells for integrated high-speed screening arrays",

abstract = "This paper explores the use of photo patternable polymers for integrated high-speed screening arrays, where enzyme reactions are monitored in nano liter volume reactors using fluorescence of NADH and photodiode detection. Implementing the array of nano liter volume wells using a low-temperature CMOS-compatible process allows wells to be patterned after the photodiode array and electronics fabrication is completed. We demonstrate filling of 400 $MUL 400 micron square, 25 micron deep photoresist-on-silicon wells with liquid samples by electro spray and wetting. We also demonstrate usability of the wells on NADH samples by measuring the fluorescence of 0.1, 0.5 and 1 millimolar NADH solutions using external optics.",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "BL Gray and R Moerman and {van den Doel}, LR and HRC Dietrich and VP Iordanov and NP Pham and PM Sarro and A Bossche and MJ Vellekoop",

note = "ISSN 0277-786X, phpub 31; Biomedical Nanotechnology Architectures and Applications (San Jose, CA, USA) ; Conference date: 20-01-2002 Through 21-01-2002",

year = "2002",

language = "Undefined/Unknown",

isbn = "0-8194-4365-4",

publisher = "SPIE",

pages = "103--108",

editor = "DJ Bornhop and DA Dunn and RP Mariella and CJ Murphy and DV Nicolau and Shuming Nie and M Palmer and R Raghavachari",

booktitle = "Biomedical Nanotechnology Architectures and Applications, Proceedings",

address = "United States",

}

Gray, BL, Moerman, R, van den Doel, LR, Dietrich, HRC, Iordanov, VP, Pham, NP, Sarro, PM , Bossche, A & Vellekoop, MJ 2002, CMOS-compatible wells for integrated high-speed screening arrays. in DJ Bornhop, DA Dunn, RP Mariella, CJ Murphy, DV Nicolau, S Nie, M Palmer & R Raghavachari (eds), Biomedical Nanotechnology Architectures and Applications, Proceedings. Proceedings of SPIE- International Society for Optical Engineering, vol. 4626, SPIE, Bellingham, WA, USA, pp. 103-108, Biomedical Nanotechnology Architectures and Applications (San Jose, CA, USA), 20/01/02.

CMOS-compatible wells for integrated high-speed screening arrays. / Gray, BL; Moerman, R; van den Doel, LR et al.
Biomedical Nanotechnology Architectures and Applications, Proceedings. ed. / DJ Bornhop; DA Dunn; RP Mariella; CJ Murphy; DV Nicolau; Shuming Nie; M Palmer; R Raghavachari. Bellingham, WA, USA: SPIE, 2002. p. 103-108 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 4626).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - CMOS-compatible wells for integrated high-speed screening arrays

AU - Gray, BL

AU - Moerman, R

AU - van den Doel, LR

AU - Dietrich, HRC

AU - Iordanov, VP

AU - Pham, NP

AU - Sarro, PM

AU - Bossche, A

AU - Vellekoop, MJ

N1 - ISSN 0277-786X, phpub 31

PY - 2002

Y1 - 2002

N2 - This paper explores the use of photo patternable polymers for integrated high-speed screening arrays, where enzyme reactions are monitored in nano liter volume reactors using fluorescence of NADH and photodiode detection. Implementing the array of nano liter volume wells using a low-temperature CMOS-compatible process allows wells to be patterned after the photodiode array and electronics fabrication is completed. We demonstrate filling of 400 $MUL 400 micron square, 25 micron deep photoresist-on-silicon wells with liquid samples by electro spray and wetting. We also demonstrate usability of the wells on NADH samples by measuring the fluorescence of 0.1, 0.5 and 1 millimolar NADH solutions using external optics.

AB - This paper explores the use of photo patternable polymers for integrated high-speed screening arrays, where enzyme reactions are monitored in nano liter volume reactors using fluorescence of NADH and photodiode detection. Implementing the array of nano liter volume wells using a low-temperature CMOS-compatible process allows wells to be patterned after the photodiode array and electronics fabrication is completed. We demonstrate filling of 400 $MUL 400 micron square, 25 micron deep photoresist-on-silicon wells with liquid samples by electro spray and wetting. We also demonstrate usability of the wells on NADH samples by measuring the fluorescence of 0.1, 0.5 and 1 millimolar NADH solutions using external optics.

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

UR - http://spie.org/scripts/abstract.pl?bibcode=2002SPIE%2e4626%2e%2e103G&page=1&qs=spie

M3 - Conference contribution

SN - 0-8194-4365-4

SP - 103

EP - 108

BT - Biomedical Nanotechnology Architectures and Applications, Proceedings

A2 - Bornhop, DJ

A2 - Dunn, DA

A2 - Mariella, RP

A2 - Murphy, CJ

A2 - Nicolau, DV

A2 - Nie, Shuming

A2 - Palmer, M

A2 - Raghavachari, R

PB - SPIE

CY - Bellingham, WA, USA

T2 - Biomedical Nanotechnology Architectures and Applications (San Jose, CA, USA)

Y2 - 20 January 2002 through 21 January 2002

ER -

Gray BL, Moerman R, van den Doel LR, Dietrich HRC, Iordanov VP, Pham NP et al. CMOS-compatible wells for integrated high-speed screening arrays. In Bornhop DJ, Dunn DA, Mariella RP, Murphy CJ, Nicolau DV, Nie S, Palmer M, Raghavachari R, editors, Biomedical Nanotechnology Architectures and Applications, Proceedings. Bellingham, WA, USA: SPIE. 2002. p. 103-108. (Proceedings of SPIE- International Society for Optical Engineering).

CMOS-compatible wells for integrated high-speed screening arrays

Abstract

Publication series

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Bibliographical note

Keywords

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