CMOS-compatible wells for integrated high-speed screening arrays

BL Gray, R Moerman, LR van den Doel, HRC Dietrich, VP Iordanov, NP Pham, PM Sarro, A Bossche, MJ Vellekoop

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)


This paper explores the use of photo patternable polymers for integrated high-speed screening arrays, where enzyme reactions are monitored in nano liter volume reactors using fluorescence of NADH and photodiode detection. Implementing the array of nano liter volume wells using a low-temperature CMOS-compatible process allows wells to be patterned after the photodiode array and electronics fabrication is completed. We demonstrate filling of 400 $MUL 400 micron square, 25 micron deep photoresist-on-silicon wells with liquid samples by electro spray and wetting. We also demonstrate usability of the wells on NADH samples by measuring the fluorescence of 0.1, 0.5 and 1 millimolar NADH solutions using external optics.
Original languageUndefined/Unknown
Title of host publicationBiomedical Nanotechnology Architectures and Applications, Proceedings
EditorsDJ Bornhop, DA Dunn, RP Mariella, CJ Murphy, DV Nicolau, Shuming Nie, M Palmer, R Raghavachari
Place of PublicationBellingham, WA, USA
Number of pages6
ISBN (Print)0-8194-4365-4
Publication statusPublished - 2002
EventBiomedical Nanotechnology Architectures and Applications (San Jose, CA, USA) - Bellingham, WA, USA
Duration: 20 Jan 200221 Jan 2002

Publication series

NameProceedings of SPIE- International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceBiomedical Nanotechnology Architectures and Applications (San Jose, CA, USA)

Bibliographical note

ISSN 0277-786X, phpub 31


  • conference contrib. refereed
  • Conf.proc. > 3 pag

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