Co-development of stress and texture in reactive magnetron sputtered TiN films revealed by in situ film stress measurements

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1313-1319
    Number of pages7
    JournalSurface and Coatings Technology
    Volume206
    Publication statusPublished - 2010

    Keywords

    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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