Co-development of stress and texture in reactive magnetron sputtered TiN films revealed by in situ film stress measurements

R Machunze, FD Tichelaar, GCAM Janssen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1313-1319
Number of pages	7
Journal	Surface and Coatings Technology
Volume	206
Publication status	Published - 2010

Keywords

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title = "Co-development of stress and texture in reactive magnetron sputtered TiN films revealed by in situ film stress measurements",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "R Machunze and FD Tichelaar and GCAM Janssen",

year = "2010",

language = "English",

volume = "206",

pages = "1313--1319",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - Co-development of stress and texture in reactive magnetron sputtered TiN films revealed by in situ film stress measurements

AU - Machunze, R

AU - Tichelaar, FD

AU - Janssen, GCAM

PY - 2010

Y1 - 2010

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0257-8972

VL - 206

SP - 1313

EP - 1319

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -