Coherent Fourier Scatterometry for detection of nanometer-sized particles on a planar substrate surface.

S Roy, AC da Costa Assafrao, SF Pereira, HP Urbach

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)13250-13262
Number of pages13
JournalOptics Express
Volume22
Issue number11
Publication statusPublished - 2014

Keywords

  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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