Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography

Haoyang Yin; Dmytro Kolenov; Silvania F. Pereira

doi:10.1364/OL.463807

Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography

Haoyang Yin, Dmytro Kolenov, Silvania F. Pereira^*

^*Corresponding author for this work

ImPhys/Optics

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Abstract

We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates at very low power level (P=0.016 mW). The improvement in sensitivity is due to two reasons: first, the boost in the signal at the detector due to the added reference beam; and second, the reduction of background noise caused by the electronics. With this new system, we are able to detect a 60-nm polystyrene latex (PSL) particle at a wavelength of 633 nm (∼λl/10) on a silicon wafer with an improvement in the signalto- noise ratio (SNR) of approximately 4 dB. c 2022 Optica Publishing Group

Original language	English
Pages (from-to)	3840-3843
Number of pages	4
Journal	Optics Letters
Volume	47
Issue number	15
DOIs	https://doi.org/10.1364/OL.463807
Publication status	Published - 2022

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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@article{67232af65a094a39b6dfc4113a0071e1,

title = "Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography",

abstract = "We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates at very low power level (P=0.016 mW). The improvement in sensitivity is due to two reasons: first, the boost in the signal at the detector due to the added reference beam; and second, the reduction of background noise caused by the electronics. With this new system, we are able to detect a 60-nm polystyrene latex (PSL) particle at a wavelength of 633 nm (∼λl/10) on a silicon wafer with an improvement in the signalto- noise ratio (SNR) of approximately 4 dB. c 2022 Optica Publishing Group",

author = "Haoyang Yin and Dmytro Kolenov and Pereira, {Silvania F.}",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.",

year = "2022",

doi = "10.1364/OL.463807",

language = "English",

volume = "47",

pages = "3840--3843",

journal = "Optics Letters",

issn = "0146-9592",

publisher = "The Optical Society",

number = "15",

}

TY - JOUR

T1 - Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography

AU - Yin, Haoyang

AU - Kolenov, Dmytro

AU - Pereira, Silvania F.

N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2022

Y1 - 2022

N2 - We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates at very low power level (P=0.016 mW). The improvement in sensitivity is due to two reasons: first, the boost in the signal at the detector due to the added reference beam; and second, the reduction of background noise caused by the electronics. With this new system, we are able to detect a 60-nm polystyrene latex (PSL) particle at a wavelength of 633 nm (∼λl/10) on a silicon wafer with an improvement in the signalto- noise ratio (SNR) of approximately 4 dB. c 2022 Optica Publishing Group

AB - We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates at very low power level (P=0.016 mW). The improvement in sensitivity is due to two reasons: first, the boost in the signal at the detector due to the added reference beam; and second, the reduction of background noise caused by the electronics. With this new system, we are able to detect a 60-nm polystyrene latex (PSL) particle at a wavelength of 633 nm (∼λl/10) on a silicon wafer with an improvement in the signalto- noise ratio (SNR) of approximately 4 dB. c 2022 Optica Publishing Group

UR - http://www.scopus.com/inward/record.url?scp=85135397191&partnerID=8YFLogxK

U2 - 10.1364/OL.463807

DO - 10.1364/OL.463807

M3 - Article

C2 - 35913328

AN - SCOPUS:85135397191

SN - 0146-9592

VL - 47

SP - 3840

EP - 3843

JO - Optics Letters

JF - Optics Letters

IS - 15

ER -

Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography

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