Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography

Haoyang Yin, Dmytro Kolenov, Silvania F. Pereira*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review


We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates at very low power level (P=0.016 mW). The improvement in sensitivity is due to two reasons: first, the boost in the signal at the detector due to the added reference beam; and second, the reduction of background noise caused by the electronics. With this new system, we are able to detect a 60-nm polystyrene latex (PSL) particle at a wavelength of 633 nm (∼λl/10) on a silicon wafer with an improvement in the signalto- noise ratio (SNR) of approximately 4 dB. c 2022 Optica Publishing Group

Original languageEnglish
Pages (from-to)3840-3843
Number of pages4
JournalOptics Letters
Issue number15
Publication statusPublished - 2022

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.


Dive into the research topics of 'Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography'. Together they form a unique fingerprint.

Cite this