Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography

Haoyang Yin, Dmytro Kolenov, Silvania F. Pereira*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

Abstract

We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates at very low power level (P=0.016 mW). The improvement in sensitivity is due to two reasons: first, the boost in the signal at the detector due to the added reference beam; and second, the reduction of background noise caused by the electronics. With this new system, we are able to detect a 60-nm polystyrene latex (PSL) particle at a wavelength of 633 nm (∼λl/10) on a silicon wafer with an improvement in the signalto- noise ratio (SNR) of approximately 4 dB. c 2022 Optica Publishing Group

Original languageEnglish
Pages (from-to)3840-3843
Number of pages4
JournalOptics Letters
Volume47
Issue number15
DOIs
Publication statusPublished - 2022

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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