Coherent Fourier Scatterometry (Tool for improved sensitivity in semiconductor metrology)

N Kumar, O El Gawhary, VG Kutchoukov, SF Pereira, W Coene, HP Urbach

Research output: Contribution to journalConference articleScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalProceedings of SPIE- International Society for Optical Engineering
Volume8324
Publication statusPublished - 2012

Keywords

  • conference contrib. refereed

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