Coherent Fourier Scatterometry (Tool for improved sensitivity in semiconductor metrology)

N Kumar, O El Gawhary, VG Kutchoukov, SF Pereira, W Coene, HP Urbach

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	8324
Publication status	Published - 2012

p 83240Q1-8

Keywords

@article{536d744e62d04432b42894757a07829d,

title = "Coherent Fourier Scatterometry (Tool for improved sensitivity in semiconductor metrology)",

keywords = "conference contrib. refereed",

author = "N Kumar and {El Gawhary}, O and VG Kutchoukov and SF Pereira and W Coene and HP Urbach",

note = "p 83240Q1-8",

year = "2012",

language = "English",

volume = "8324",

pages = "1--8",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Coherent Fourier Scatterometry (Tool for improved sensitivity in semiconductor metrology)

AU - Kumar, N

AU - El Gawhary, O

AU - Kutchoukov, VG

AU - Pereira, SF

AU - Coene, W

AU - Urbach, HP

N1 - p 83240Q1-8

PY - 2012

Y1 - 2012

KW - conference contrib. refereed

M3 - Conference article

SN - 0277-786X

VL - 8324

SP - 1

EP - 8

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -