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Coherent Fourier Scatterometry

N Kumar

    Research output: Thesis › Dissertation (TU Delft)

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Urbach, H.P., Promotor
    • Pereira, S.F., Copromotor
    Award date1 Dec 2014
    Place of PublicationEnschede
    Publisher
    Print ISBNs9789462594685
    Publication statusPublished - 2014

    Keywords

    • Diss. prom. aan TU Delft

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